Intralogistics in the semiconductor industry: Automated FOSB storage in a compact layout

In a current customer project, we were faced with a clear task: to develop a cleanroom intralogistics system that combines storage, transport, manual transfer and vertical material flow within one compact system. 

The customer, a manufacturer from the semiconductor industry, needed a solution for the reliable storage and retrieval of FOSB containers (Front Opening Shipping Boxes) for 300 mm wafers. Key requirements included high storage capacity, flexible transfer options, safe manual operation, compliance with the required cleanroom conditions according to ISO Class 4 and the ability to expand the system in the future.

Our solution: a combination of Max Stocker, 15 meters of SCI Conveyor, two lifts, two docking stations and two intrinsically safe double rotary gates. The result is an integrated system that safely combines automated processes with manual operations.

With 630 storage spaces in a double-deep rack, a throughput of up to 120 boxes per hour, a system size of 15.1 m x 2.75 m x 4.3 m and a design according to ISO Class 4, the system delivers high performance within a compact footprint.

High capacity in limited cleanroom space 

Cleanroom space is valuable. That is why it was particularly important to achieve as much storage capacity as possible within an efficient footprint.

The Max Stocker serves as the central storage system and enables space-saving storage of 300 mm FOSB containers thanks to its double-deep rack design. The system was implemented with one storage and retrieval unit, but is already prepared for the optional integration of a second vehicle at a later stage.

This keeps the system flexible and allows it to grow with the customer’s increasing requirements.

Automatic storage and retrieval of up to six FOSB 

One special feature of the project is the specifically developed docking stations for batch transport carts. These enable the automatic storage of up to six FOSB containers. 

The docking stations are more than simple transfer points. Thanks to the integrated intelligence in the stations and in the gripper unit of the stocker vehicle, full traceability of the batch ID is possible.

For the customer, this means greater transparency in the material flow and reliable tracking within the system.

Flexible material flows via conveyor, lifts and manual ports

The 15-meter SCI Conveyor line can be used both as an input and output port. This allows specific batches to be transferred into storage or made available to the operator from storage. 

In addition, two lifts with operator loading stations enable vertical material flow within the system. This reduces manual transport routes and makes it easier to connect different transfer points. 

For manual processes, two double rotary gates were integrated. These serve as manual ports and allow individual containers to be provided or stored.

The special feature: thanks to an intrinsically safe concept, the stocker remains active during the rotation process, while direct operator access to the running system is excluded. 

This allows automated processes and manual operation to run in parallel without compromising process safety. 

Expandable for future requirements 

Although no direct connection to third-party systems or an OHT system was implemented in this project, the concept is prepared for future expansions.

A connection to third-party systems is optionally possible via SEMI E84. A later integration of an OHT transfer can also be implemented. This means the system is not only suitable for current requirements, but can continue to grow with the production environment.

Currently, FOSB containers are handled in the system. However, by integrating different IDENT systems, the combined use of additional box types, such as FOUP, is also possible.

Conclusion

This project shows how individual cleanroom intralogistics in the semiconductor industry needs to be. The customer did not require a single standard component, but an integrated system that combines storage, transport, manual transfer, vertical material flow and traceability.

With the combination of Max Stocker, SCI Conveyor, lifts, docking stations and intrinsically safe rotary gates, we were able to realize a solution that combines high capacity, safe operation and flexible material flows within a compact footprint.

For more information about SCI, visit sci.schiller.de