State-of-the-art mobile robot designed for flexible transportation and secure handling of reticle pods in semiconductor manufacturing and cleanroom environments.
Fabmatics
Space-saving all-in-one-solution for the automated management of test wafers.
Fabmatics
Space-saving, floor-based, automatic storage system with its own cleanroom atmosphere.
Fabmatics
Innovative system to save valuable cleanroom space by storing material carriers underneath the ceiling.
Fabmatics
Rail guided robot to ensure reliable and fast transport of material carriers in the cleanroom.
Fabmatics
Reliable, clean wafer storage between process steps without costly infrastructure changes.
Fabmatics
Retrofittable, tailored, and scalable identification solutions that enable process control, traceability, and future-proof automation.
Fabmatics
Powerful tool for analyzing and assessing existing system conditions or for enabling well-founded decisions in cleanroom automation projects.
Fabmatics
Innovative overhead transport system meets strict design principles for particle avoidance, in order to overcome common challenges for state-of-the-art cleanroom manufacturing environments. High flexibility also enables easy retrofits and extension of existing automation systems.
SCI
High throughput, completely automated system for cleanroom transportation needs. In combination with the Cleanroom Transport System, trays can be supplied 24/7 at high repeat accuracy with the Linear Hoist Equipment without intervention of the operator.
SCI
The cleanroom transport system with maximum flexibility and customization. At the core is the Cleanroom Conveyor system, with cleanroom tested components and innovative magnetic drive technology for contact-free, friction-free power transmission to the rollers.
SCI
The solution that offers completely new dimensions for low-particulate warehouse storage in the cleanroom up to ISO class 4 with double-sided, doubledepth container storage spaces and an optional nitrogen-purge version.
SCI
The decentralized Linear Stocker may be flexibly arranged for transport and storage of individual, customer-specific products.
Able to be used for sequencing or commissioning production batches.
SCI
Customized storage solution for cleanrooms up to ISO class 3. Developed to meet customers’ needs to integrate small, compact warehouses into their production, and also act as a production buffer.
SCI
